In the present study, diamond-like carbon thin films were formed by ion beam deposition by using titanium (Ti) and chromium (Cr) interlayers. effect of the interlayers on structural and mechanical properties of diamond-like carbon thin films was studied. Raman spectroscopy analysis was used to investigate the structural changes of the formed carbon coatings. Field emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM) were used to examine the thickness and surface roughness of layers. mechanical properties of diamond-like carbon coatings were investigated by nano-indentation testing. The results of Raman analysis showed that the diamond-like carbon coating formed with a Ti interlayer, the ratio of the diamond-like carbon monolayer coating and the carbon coating with a Cr interlayer had a lower ID/IG ratio of 0.48 and more sp3 diamond bonds. The results of nano-indentation test for carbon coatings showed that the inclusion of Ti and Cr interlayers led to an increase in hardness in the diamond-like carbon coating. Also, according to the results, the Ti/DLC coating had higher hardness of 25 Gpa and plastic strength (H/E) than the Cr/DLC coating.