مواد و فناوری‌های پیشرفته

مواد و فناوری‌های پیشرفته

ریزساختار، ریخت‌شناسی و عملکرد الکتروکاتالیستی پوشش DLC نیمه‌رسانای نوع n لایه‌نشانی‌شده بر روی تیتانیوم از طریق PECVD

نوع مقاله : مقاله کامل پژوهشی

نویسندگان
علی رضا سرشار نوشهر 1
کوروش جعفرزاده 2
1 دانشجوی دکتری مهندسی مواد و متالورژی، مجتمع دانشگاهی مواد و فناوری‌های ساخت، دانشگاه صنعتی مالک اشتر، تهران، ایران
2 دانشیار، مجتمع دانشگاهی مواد و فناوری‌های ساخت، دانشگاه صنعتی مالک اشتر، تهران، ایران
10.30501/jamt.2026.562840.1348
چکیده
استفاده حداکثری از پتانسیل الکتروشیمیایی لایه‌های نازک کربن شبه‌الماس (DLC) در گرو فهم دقیق و ظریف از پارامترهای لایه‌نشانی آن‌ها است. این پژوهش به‌دقّت به بررسی تأثیر عمیق نسبت فاز گازی متان به هیدروژن (CH₄/H₂) بر عملکرد الکتروشیمیایی لایه‌های DLC، که با استفاده از لایه‌نشانی شیمیایی بخار تقویت‌شده با پلاسمای جریان مستقیم (DCPECVD) بر روی زیرلایه‌های تیتانیوم ایجاد شده‌اند، می‌پردازد. یک بررسی نظام‌مند در شارهای مختلف گاز متان از 5/0 تا sccm 5/4، تأثیر چشمگیری را بر ریزساختار لایه، به‌ویژه نسبت هیبریداسیون sp³/sp² و ریخت‌شناسی دانة آن، آشکار کرد. مشخصه‌یابی جامع ریزساختاری با استفاده از میکروسکوپ الکترونی روبشی (SEM) و طیف‌سنجی رامان انجام شد و رفتار الکتروشیمیایی به‌صورت کمّی با استفاده از طیف‌سنجی امپدانس الکتروشیمیایی (EIS) و تحلیل مات-شاتکی ارزیابی گردید. یافته‌ها به‌وضوح یک هم‌بستگی مستقیم را بین نسبت CH₄/H₂ و ویژگی‌های ساختاری و کارایی الکتروشیمیایی پوشش‌های DLC، تأیید می‌کنند. به‌طرز چشمگیری، نسبت بهینه sccm 5/0 متان منجر به تولید لایه‌های DLC با ریزساختار برتر، نسبت sp³/sp² بالاتر و ساختارهای دانه‌ای ریز و یکنواخت شد که به‌نوبة خود، فعالیت الکتروکاتالیستی را به‌طور قابل‌توجهی افزایش داد. علاوه‌براین، خواص نیمه‌رسانایی نوع n در تمام نمونه‌های DLC مورد بررسی، یکنواخت مشاهده شد.
کلیدواژه‌ها
کربن شبه‌الماس
لایه‌نشانی شیمیایی بخار تقویت‌شده با پلاسمای جریان مستقیم
میکروساختار
ریخت‌شناسی
عملکرد الکتروکاتالیستی
موضوعات

عنوان مقاله English

Microstructure, morphology, and electrocatalytic performance of n-type semiconductor DLC coating deposited on Titanium via PECVD

نویسندگان English

Alireza Sarshar Noshahr 1
Kourosh Jafarzadeh 2
1 PhD student at Faculty of Materials and Manufacturing Technologies, Malek Ashtar University of Technology, Tehran, Iran.
2 Associate Professor at Faculty of Materials and Manufacturing Technologies, Malek Ashtar University of Technology, Tehran, Iran.
چکیده English

Unlocking the full electrochemical potential of diamond-like carbon (DLC) thin films hinges on a nuanced understanding of their synthesis parameters. This study meticulously investigates the profound influence of the methane-to-hydrogen gas ratio on the electrocatalytic performance of DLC films precisely fabricated via direct current plasma-enhanced chemical vapor deposition (DCPECVD). A systematic exploration across methane flow rates from 0.5 to 4.5 sccm revealed a dramatic impact on the film’s microstructure, particularly its sp³/sp² hybridization ratio and grain morphology. The morphology and structure of the samples were studied by scanning electron microscopy (SEM) and Raman spectroscopy, while electrochemical behavior was quantitatively assessed via electrochemical impedance spectroscopy (EIS) and Mott–Schottky analysis. The findings unequivocally establish a direct correlation between methane concentration and both the structural attributes and electrochemical efficacy of the DLC coatings. Strikingly, an optimized methane concentration of 0.5 sccm yielded DLC films with an excellent microstructure, marked by a higher sp³/sp² ratio and finely uniform grain structures, which in turn facilitated markedly enhanced electrocatalytic activity. Furthermore, consistent n-type semiconductor conductivity was observed across all investigated DLC samples.

کلیدواژه‌ها English

DLC
PECVD
Microstructure
Morphology
Electrocatalytic Performance
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مواد و فناوری‌های پیشرفته
دوره 14، شماره 4
زمستان 1404
صفحه 90-104

  • تاریخ دریافت 25 آذر 1404
  • تاریخ بازنگری 20 بهمن 1404
  • تاریخ پذیرش 26 خرداد 1405