Document Type : Original Reaearch Article

Author

Department of Nanotechnology Engineering, Faculty of Advanced Science and Technologies, University of Isfahan, Isfahan, Iran.

Abstract

Here, nanostructured lead zirconate titanate (PZT) thin films were deposited on Au/SiO2 substrates through the polyol-based sol-gel process using chloride precursors and a dihydric alcohol. Propylene glycol was used as both the chelating agent and the solvent to prepare high-quality PZT thin films. Our polyol-based method exhibited several advantages: The process is cost-effective because of the low cost of the precursors, also, unlike the conventional alkoxide-based method, the prepared PZT sols were stable for several years, and the perovskite PZT phase could form at low temperature, within 450 -575°C, according to DTA/TG results. Thus, once the substrate was prepared, PZT layers were deposited by spin coating the sol, followed by ambient drying and pyrolysis at 450°C. The final PZT thin films were annealed at 575°C. X-ray diffraction (XRD) analysis confirmed crystallization of the PZT perovskite structure at 575°C in the annealed nanostructured films. Both optical and SEM images showed that PZT films are uniform and crack free. The EDS analysis confirmed that the films consist of the PZT components. 

Keywords

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