Journal of Advanced Materials and Technologies

Journal of Advanced Materials and Technologies

Investigating of Structural Evolution of Diamond-Like Carbon Thin Film Applied by Ion Beam Deposition Technology under the Effect of Substrate Temperature

Document Type : Original Reaearch Article

Authors
Saeid Mersagh Dezfuli 1
Soheila Rouholahi 2
Seyed Hojatollah Hosseini 3
Karim Zangeneh Madar 4
Mohammadreza Ebrahimi Fordoei 2
1 Ph. D. Student, Department of Materials Engineering, Malek Ashtar University of Technology, Tehran, Tehran, Iran
2 M. Sc., Department of Materials Engineering, Malek Ashtar University of Technology, Tehran, Tehran, Iran
3 Assistant Professor, Department of Materials Engineering, Malek Ashtar University of Technology, Tehran, Tehran, Iran
4 Associate Professor, Department of Materials Engineering, Malek Ashtar University of Technology, Tehran, Tehran, Iran
10.30501/jamt.2022.349543.1233
Abstract
The substrate temperature plays an important role in the mobility of carbon species as well as the formation and growth mechanism of the amorphous carbon layers with diamond-like characteristics. The amorphous carbon structure can be transformed into the diamond- and graphite-like structure under the effect of substrate temperature. Given that, this study aimed to investigate the structural evolution of the diamond-like carbon coating followed by changing the substrate temperature through the radio frequency direct ion beam deposition. In this regard, the substrate temperature values were obtained as 80, 110, and 140 °C for the deposition of DLC coatings. Raman and X-Ray Spectroscopy (XPS) analyzes were done to evaluate the structure and chemical composition of the coatings. To further investigate the thickness and roughness of the applied coatings, Atomic Force Microscopy (AFM) and Field Emission Scanning Electron Microscopy (FESEM) were used. According to the results, the lowest roughness value of the diamond-like carbon coating surface was obtained at the substrate temperature of 110 °C. In addition, the lowest value of ID/IG and the highest amount of sp3 bonding were obtained at the same substrate temperature.
Keywords
Ion Beam Deposition
Substrate Temperature
Sp3 Bond
Diamond-Like Carbon
  1. Robertson, J., "Diamond-like amorphous carbon", Materials Science and Engineering, R: Reports, 37, No. 4-6, (2002), 129-281. https://doi.org/10.1016/S0927-796X(02)00005-0
  2. Bewilogua, K., Hofmann, D., "History of diamond-like carbon films-From first experiments to worldwide applications", Surface and Coatings Technology, 242, (2014), 214-225. https://doi.org/10.1016/j.surfcoat.2014.01.031
  3. Marks, N. A., "Thin film deposition of tetrahedral amorphous carbon: A molecular dynamics study", Diamond and Related Material, 14, No. 8, (2005), 1223-1231. https://doi.org/10.1016/j.diamond.2004.10.047
  4. Gotzmann, G., Beckmann, J., Wetzel, C., Scholz, B., Herrmann,, Neunzehn, J., "Electron-beam modification of DLC coatings for biomedical applications", Surface and Coatings Technology, Vol. 311, (2017), 248-256. https://doi.org/10.1016/j.surfcoat.2016.12.080
  5. Wänstrand, O., Larsson, M., Hedenqvist, P., "Mechanical and tribological evaluation of PVD WC/C coatings", Surface and Coatings Technology, Vol. 111, No. 2-3, (1999), 247-254. https://doi.org/10.1016/S0257-8972(98)00821-4
  6. Yu, W., Wang, J., Huang, W., Cui, L., Wang, L., "Improving high temperature tribological performances of Si doped diamond-like carbon by using W interlayer", Tribology International, Vol. 146, (2020), 106241. https://doi.org/10.1016/j.triboint.2020.106241
  7. Lifshitz, Y., "Diamond-like carbon - present status", Diamond and Related Materials, Vol. 8, No. 8-9, (1999), 1659-1676. https://doi.org/10.1016/S0925-9635(99)00087-4
  8. Robertson, J., "The deposition mechanism of diamond-like a-C and a-C: H", Diamond and Related Materials, Vol. 3, No. 4-6, (1994), 361-368. https://doi.org/10.1016/0925-9635(94)90186-4
  9. Chowdhury, S., Laugier, M. T., Rahman, I. Z., "Effects of substrate temperature on bonding structure and mechanical properties of amorphous carbon films", Thin Solid Films, 447–448, (2004), 174-180. https://doi.org/10.1016/S0040-6090(03)01076-9
  10. Kanda, K., Shimizugawa, Y., Haruyama, Y., Yamada, I., Matsui, S., Kitagawa, T., Tsubakino, H., Gejo, T., "NEXAFS study on substrate temperature dependence of DLC films formed by Ar cluster ion beam assisted deposition", Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 206, (2003), 880-883. https://doi.org/10.1016/S0168-583X(03)00888-7
  11. Lifshitz, Y., Lempert, G. D., Grossman, E., "Substantiation of subplantation model for diamondlike film growth by atomic force microscopy", Physical Review Letters, Vol. 72, No. 17, (1994), 2753-2756. https://doi.org/10.1103/PhysRevLett.72.2753
  12. Eckertova, L., Physics of Thin Films, New York, Plenum Press, (1977).
  13. Ferrari, A. C., Robertson, J., "Interpretation of Raman spectra of disordered and amorphous carbon", Physical Review, B, Vol. 61, No. 20, (2000), 14095-14107. https://doi.org/10.1103/PhysRevB.61.14095
  14. Ahmed, S. K. F., Moon, M. W., Lee, K. R., "Effect of silver doping on optical property of diamond like carbon films", Thin Solid Films, Vol. 517, No. 14, (2009), 4035-4038. https://doi.org/10.1016/j.tsf.2009.01.135
  15. Mersagh Dezfuli, S., Sabzi, M., "Review of the effect of presence of yttria and benzotriazole inhibitor factor on electrochemical properties and activation of self-healing mechanism in alumina-based coatings", Journal of Advanced Materials and Technologies (JAMT), Vol. 7, No. 4, (2019), 75-92. https://doi.org/30501/JAMT.2019.84402

 

Journal of Advanced Materials and Technologies
Volume 11, Issue 3
Autumn 2022
Pages 31-42

  • Receive Date 06 July 2022
  • Revise Date 11 August 2022
  • Accept Date 08 September 2022