مشخصه یابی پوشش های نانوساختار سیستم Ti-Al-C-N ایجاد شده به روش رسوب دهی شیمیایی بخار به کمک پلاسما

نوع مقاله: مقاله کامل پژوهشی

نویسندگان

دانشکده مهندسی مواد و متالورژی، دانشگاه علم و صنعت ایران، تهران، ایران

چکیده

در این تحقیق، پوشش های سرامیکی کربونیترید تیتانیوم آلومینیوم (TiAlCN) با مقادیر مختلفی از آلومینیوم در دمای °C 350 بر زیرلایه های فولاد ابزار گرم کار H13 با استفاده از روش رسوب شیمیایی بخار به کمک پلاسما (PACVD) نشانده شدند. مشخصه یابی پوشش های ایجاد شده با استفاده از آزمایش های پراش پرتو ایکس (GIXRD)، میکروسکوپ الکترونی روبشی گسیل میدانی (FESEM) و میکروسکوپ الکترونی روبشی(SEM) مجهز به آنالیزگر عنصری طیف سنجی پرتو ایکس (EDS)، طیف سنجی تبدیل فوریه مادون قرمز (FTIR)، طیف سنجی رامان،میکروسکوپ الکترونی عبوری (TEM) و میکروسکوپ نیروی اتمی (AFM) انجام شد. ریزسختی پوشش ها توسط آزمایش ریزسختی سنجی ویکرز مورد بررسی قرار گرفت. نتایج بدست آمده نشان داد که پوشش ها دارای یک نانوساختار شامل نانو دانه های بلورین fcc-(Ti,Al)N و/یا fcc-(Ti,Al)(C,N)، hcp-AlN و یک فاز کربنی آمورف می باشند. افزایش مقدار آلومینیوم موجود در پوشش از حدود 10 تا حدود 42 درصد اتمی منجر به کاهش زبری سطحی پوشش از 49±151 نانومتر به 27±88 نانومتر به دلیل ایجاد هسته بیشتر از AlN شد. بیشترید مقدار میکروسختی مربوط به پوشش با مقدار آلومینیوم کمتر بود که در حدود HV0.01 3840±40 به دلیل مقدار ناخالصی کلر و فاز hcp-AlN کمتر، بدست آمد.

کلیدواژه‌ها

موضوعات


عنوان مقاله [English]

Characterization of Nanostructure Coatings of Ti-Al-C-N System Deposited Using Plasma Assisted Chemical Vapor Deposition

نویسندگان [English]

  • mahshid rashidi
  • morteza tamizifar
  • seyyed mohammad ali boutorabi
Department of Metallurgy and Materials Engineering, University of Science and Technology, Tehran, Iran
چکیده [English]

In this study, titanium aluminium carbonitride (TiAlCN) ceramic coatings with different amount of Al were deposited at 350 °C on H13 hot work tool steel substrates, using pulsed-DC plasma assisted chemical vapor deposition method. Energy-dispersive X-ray spectroscopy (EDS), Fourier-transform infrared spectroscopy (FTIR), glancing incidence X-ray diffraction method (GIXRD), transmission electron microscopy (TEM), Raman spectroscopy, field emission scanning electron microscopy (FE-SEM) and SEM and atomic force microscopy (AFM) were applied for characterizing of the coatings. Microhardness test utilized for evaluating of microhardness of the coatings. The coatings showed a nanostructure consisted of fcc-TiAlN and hcp-AlN nanocrystalline grains and an amorphous carbon phase. Increasing the amount of Al from ~10 to ~42 at.% led to a decrease of the surface roughness of the coating from 151±49 to 88±27 nm, due to the creation of more nuclei of AlN. Coating with the less amount of Al (~10 at.%) presented the highest microhardness of about 3840 HV0.01,due to the less amount of chloride impurity and hcp-AlN phase.

کلیدواژه‌ها [English]

  • coating
  • Nanostructure
  • TiAlCN
  • PACVD
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